*0011753012 *008991126s1999 xx# 000 0 nob *019 $bk *08230$a621.3817 *100 $aGlømmen, Jon E.$_129047300 *245 $aMikro- og nanoteknologi: Small is beautiful *300 $aS. 112, 114 : ill. *650 $aMEMS-teknologi$9nor$2norart$_171364200 *650 $aMicroElectroMechanical Systems$9nor$2norart$_171364300 *650 $aNanoteknologi$2norart$_20629600 *650 $aminiatyrmaskiner$9nor$2norart$_171364400 *773 $tKapital$gÅrg. 29, nr 15 (1999)$x0332-5423$w(NO-LaBS)303453(tnr) *999 $z9900268214$anorart:9900268214 ^